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经营范围
发明名称
AMBIENT-FREE PROCESSING SYSTEM
摘要
申请公布号
EP0528405(A3)
申请公布日期
1995.12.27
申请号
EP19920114087
申请日期
1992.08.18
申请人
PRAXAIR TECHNOLOGY, INC.
发明人
BRESTOVANSKY, DENNIS FRANCIS;NOWOTARSKI, MARK STEPHEN;PLANTE, WALTER (NMN)
分类号
C23C16/54;C23C16/44;C30B25/14;C30B31/16;C30B33/02;H01L21/31;H01L21/324;H01L21/677;(IPC1-7):C23C16/44;C30B31/10;H01L21/00
主分类号
C23C16/54
代理机构
代理人
主权项
地址
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