发明名称 |
A process for preparing a thin film of superconducting compound oxide |
摘要 |
A process for preparing a superconducting thin film of a compound oxide by a process which is similar to MBE technique. In the present process, a plurality of atom beams or molecular beams each contains one element selected from constituent elements of the compound oxide are directed onto a substrate in a predetermined order, so that a plurality of mono-molecular layers are deposited on the substrate. |
申请公布号 |
EP0305292(B1) |
申请公布日期 |
1995.12.27 |
申请号 |
EP19880402154 |
申请日期 |
1988.08.24 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES LIMITED |
发明人 |
HARADA, KEIZO ITAMI WORKS;FUJIMORI, NAOJI ITAMI WORKS;YAZU, SHUJI ITAMI WORKS;JODAI, TETSUJI ITAMI WORKS |
分类号 |
C23C14/08;C23C14/24;C30B23/02;H01L39/24 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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