X-ray exposure apparatus and a mask usable therewithin,申请号EP19910304452-传众专利搜索

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发明名称	X-ray exposure apparatus and a mask usable therewithin
摘要
申请公布号	EP0458539(B1)	申请公布日期	1995.12.27
申请号	EP19910304452	申请日期	1991.05.17
申请人	CANON KABUSHIKI KAISHA	发明人	HARA, SHINICHI, C/O CANON KABUSHIKI KAISHA;AMEMIYA, MITSUAKI, C/O CANON KABUSHIKI KAISHA;UZAWA, SHUNICHI, C/O CANON KABUSHIKI KAISHA
分类号	G03F1/22;G03F7/20;H01L21/027;H01L21/30;(IPC1-7):G03F7/20;G03F1/14	主分类号	G03F1/22
代理机构		代理人
主权项
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