| 摘要 |
<p>A method for the collection and subsequent regeneration of substances exhausted through a vacuum pump, which comprises, in a first phase, passing an exhaust stream from the pump to an adsorption bed in which one or more components of the stream are adsorbed and, in a second phase, regenerating adsorbed component(s) from the bed by connecting the bed to the inlet side of the vacuum pump. <IMAGE></p> |
