发明名称 |
Device for forming a compound oxide superconductor thin film |
摘要 |
There is disclosed a device for forming a thin film on a substrate by irradiating a target of a compound oxide superconducting material with a laser beam and evaporating on the substrate a thin film corresponding to a composition of the target in an oxygen ambient atmosphere by laser evaporation, a scanning optical system for causing the laser beam to scan being disposed in an optical path of the laser beam.
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申请公布号 |
US5478398(A) |
申请公布日期 |
1995.12.26 |
申请号 |
US19940194809 |
申请日期 |
1994.02.14 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAKANISHI, HIDENORI;TANAKA, SABURO;ITOZAKI, HIDEO;YAZU, SHUJI |
分类号 |
C01B13/14;C01G1/00;C23C14/28;C30B29/22;H01L39/24;(IPC1-7):C23C14/00 |
主分类号 |
C01B13/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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