| 摘要 |
A vertical vibration elimination table apparatus has a vibration elimination table supported by actuators at four portions thereof. The actuators are operable in response to signals which are fed back thereto and which are indicative of vertical positions and vertical accelerations of the four portions of the table. A control apparatus for controlling and driving the actuators includes a 4-degree-of-freedom motion mode extraction circuit for extracting motion mode error signals of four degrees of freedom including one degree of freedom for translational motion, two degrees of freedom for rotations and one degree of freedom for twist motion, a compensation circuit for producing compensated motion mode signals by effecting compensations on the respective motion mode error signals, and a motion mode distribution circuit for producing drive signals based on the compensated motion signals and delivering the drive signals to the respective actuators.
|
