发明名称 |
Process for supplying a gas, especially of diborane and silane |
摘要 |
A process for supplying a gas to a reactor comprising the steps of: (i) continuously measuring density of the gas, the gas including at least one component which is susceptible to formation of an undesired side product as shown by a variation in density of the gas; and (ii) modifying feed conditions of the gas if formation of the undesired side product is shown by a variation in the density of the gas. The process can be employed to continuously monitor the content of diborane (B2H6) in a mixture with silane (SiH4) in a process for producing a borophosphosilicate glass. An apparatus for supplying a gas to a reactor is also disclosed. |
申请公布号 |
US5478395(A) |
申请公布日期 |
1995.12.26 |
申请号 |
US19950428715 |
申请日期 |
1995.04.25 |
申请人 |
L'AIR LIQUIDE |
发明人 |
BRYSELBOUT, FRANCIS |
分类号 |
B01J4/02;B01J4/00;C01B33/04;C01B35/16;C03B37/014;C23C16/52;F17C13/02;G01N9/00;(IPC1-7):C23C16/00 |
主分类号 |
B01J4/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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