发明名称 LAMINATED POLYESTER FILM FOR PHOTORESIST
摘要 <p>PURPOSE:To obtain a high quality polyester film excellent in resolution and preventing the occurrence of image defects by specifying the haze of a biaxially oriented laminated polyester film as well as the characteristics of the surface of the top layer of the film on at least one side when the film contg. particles of a specified average particle diameter in the top layer is produced. CONSTITUTION:This laminated polyester film is a biaxially oriented laminated polyester film contg. particles of 0.01-3.0mum average particle diameter in the top layer on at least one side. The center line average roughness Ra of the surface of the top layer is >=0.005mum, the max. height Rt is <1.5mum and the haze of the film is <=1.5%. The particles are, e.g. inorg. particles of calcium carbonate, calcium phosphate or silica, org. particles such as crosslinked polymer particles or deposited particles formed at the time of polymerizing polyester. Crosslinked polymer particles of 0.1-2.0mum average particle diameter or silica particles of 0.1-3.0mum average particle diameter are preferably contained.</p>
申请公布号 JPH07333853(A) 申请公布日期 1995.12.22
申请号 JP19940132000 申请日期 1994.06.14
申请人 DIAFOIL CO LTD 发明人 SATO YOSHIKI
分类号 B32B27/36;G03F7/09;G03F7/11;H05K3/00;H05K3/06;(IPC1-7):G03F7/09 主分类号 B32B27/36
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