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发明名称
FORMING METHOD OF SIDE WALL SPACER
摘要
申请公布号
JPH07335884(A)
申请公布日期
1995.12.22
申请号
JP19940156670
申请日期
1994.06.14
申请人
SONY CORP
发明人
TAJIMA KAZUHIRO;OSADA TOMOYUKI
分类号
H01L29/78;H01L21/336;(IPC1-7):H01L29/78
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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