| 摘要 |
<p>PURPOSE:To eliminate the need for security in a clean bench of a work space for placing and extracting a cassette while smoothly displacing a cassette base. CONSTITUTION:Sliding rails 9, 10 are mounted on a device body 8 in a slidable and displaceable warmer while a cassette base 11, on which a cassette 5, in which substrates are housed at multistages, is placed, is installed to the sliding rails 9, 10, and the cassette base II is set up in a displaceable manner at the place A of the carrying-in-and-out of the substrates on the device body 8 and the place B of the mounting and dismantling of the cassette 5 displaced from the upper section of the device body 8 under the state, in which the cassette base 11 is supported by the sliding rails 9, 10.</p> |
