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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07335653(A)
申请公布日期
1995.12.22
申请号
JP19940133085
申请日期
1994.06.15
申请人
FUJITSU LTD
发明人
HOSODA TSUTOMU
分类号
H01L21/3213;(IPC1-7):H01L21/321
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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