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发明名称
PROBING DEVICE
摘要
申请公布号
JPH07335701(A)
申请公布日期
1995.12.22
申请号
JP19940128856
申请日期
1994.06.10
申请人
ADVANTEST CORP
发明人
ANDO MASAKAZU;YOSHIDA KENJI
分类号
G01R1/073;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
主权项
地址
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