FORMATION OF THIN FILM AND DEVICE THEREFOR

摘要

PURPOSE:To simultaneously form thin films on many bodies to be subjected to film formation with high precision in a uniform thickness. CONSTITUTION:When each substrate (body to be subjected to film formation) 9 is set on a rotating dome (rotary holder) 8 having a curved surface through a film forming jig and film formation is carried out, the tilt of the substrate 9 is optically detected with a light emitting means 14 and a light receiving means 15 so as to prevent missetting and the shaking of the film forming jig is inhibited during film formation by bringing the jig into spot contact with the rotating dome 8. The objective thin film is formed on the substrate 9 on the circumference of the dome 9 with high precision in a uniform thickness.