| 发明名称 |
PRESSURE SENSOR INTEGRATED WITH PRESSURE RECEIVING PIPE |
| 摘要 |
<p>PURPOSE:To obtain a small-sized pressure sensor excellent in the reproducibility of the characteristics of element. CONSTITUTION:The pressure sensor integrated with a pressure receiving pipe comprises a pressure receiving pipe 1 and a diaphragm 3 thereof wherein a strain sensor element is formed of a thin chromium oxide film 7 on the surface of the diaphragm through a thin silicon oxide film 5.</p> |
| 申请公布号 |
JPH07335911(A) |
申请公布日期 |
1995.12.22 |
| 申请号 |
JP19940123637 |
申请日期 |
1994.06.06 |
| 申请人 |
OSAKA PREFECTURE;NIPPON RINIATSUKUSU KK |
发明人 |
SUZUKI YOSHIHIKO;NOSAKA TOSHINORI;OGAWA SOICHI;TAKENAKA HIROSHI |
| 分类号 |
G01L9/04;G01L9/00;H01C7/00;H01L29/84;(IPC1-7):H01L29/84 |
主分类号 |
G01L9/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
