Verfahren und Apparatur zur Herstellung eines dünnen Oxidfilmes.,申请号DE1992605903-传众专利搜索

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发明名称	Verfahren und Apparatur zur Herstellung eines dünnen Oxidfilmes.
摘要
申请公布号	DE69205903(D1)	申请公布日期	1995.12.14
申请号	DE1992605903	申请日期	1992.07.10
申请人	SHARP K.K., OSAKA, JP;INTERNATIONAL SUPERCONDUCTIVITY TECHNOLOGY CENTER, TOKIO/TOKYO, JP;KABUSHIKI KAISHA KOBE SEIKO SHO, KOBE, HYOGO, JP	发明人	KITA, RYUSUKE, URAYASU-SHI, CHIBA-KEN, JP;HASE, TAKASHI, ICHIKAWA-SHI, CHIBA-KEN, JP;SASAKI, MASATO, MITAKA-SHI, TOKYO, JP;MORISHITA, TADATAKA, NAKA-GUN, KANAGAWA-KEN, JP
分类号	C23C8/12;C04B41/50;C04B41/85;C04B41/87;C23C8/16;C23C14/08;C23C14/24;C23C14/58;C30B23/02	主分类号	C23C8/12
代理机构		代理人
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