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发明名称
Verfahren zur Herstellung einer optoelektronischen integrierten Schaltung
摘要
申请公布号
DE4116696(C2)
申请公布日期
1995.12.14
申请号
DE19914116696
申请日期
1991.05.22
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
SHIBA, TETSUO, ITAMI, HYOGO, JP;TAKAHASHI, SHOGO, ITAMI, HYOGO, JP
分类号
H01L27/14;H01L21/205;H01L21/8252;H01L27/144;(IPC1-7):H01L27/14
主分类号
H01L27/14
代理机构
代理人
主权项
地址
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