| 摘要 |
A sensor has a coil formed on a silicon substrate through an insulating film by a micromachining technique, wherein the coil is formed by electrodeposition of a metal with a low resistivity, and its aspect ratio (h/d) as a ratio of a line thickness (h) to a line width (d) is at least one. The coil has a multilayered structure in the vertical direction and/or a core formed almost at the central position of the coil, thereby increasing an inductance.
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