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发明名称
Ultradichte DRAM-Zelle-Matrix und ihr Herstellungsverfahren.
摘要
申请公布号
DE68922819(T2)
申请公布日期
1995.12.14
申请号
DE19896022819T
申请日期
1989.08.02
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
CHIN, DAEJE, KONGNAMKU SEOUL, KR;DHONG, SANG H., MAHOPAC N.Y. 10541, US
分类号
H01L27/10;H01L21/3065;H01L21/8242;H01L27/108;(IPC1-7):H01L21/82;H01L21/76
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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