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发明名称
Verfahren zur Herstellung von Speicherkondensatoren unter Verwendung von Materialien mit hoher Dielektrizitätskonstante
摘要
申请公布号
DE19518044(A1)
申请公布日期
1995.12.14
申请号
DE1995118044
申请日期
1995.05.17
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
BEACH, DAVID B., KNOXVILLE, TENN., US;GRILL, ALFRED, WHITE PLAINS, N.Y., US;SMART, CHRISTOPHER J., WAPPINGER FALLS, N.Y., US
分类号
H01L27/04;H01L21/02;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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