WAFER SUPPORTING CARRIER,申请号KR19940015682U-传众专利搜索

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发明名称	WAFER SUPPORTING CARRIER
摘要
申请公布号	KR950010445(Y1)	申请公布日期	1995.12.13
申请号	KR19940015682U	申请日期	1994.06.29
申请人	TOSHIBA CO., LTD.	发明人	KODERA, MASAKO
分类号	H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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