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发明名称
INTEGRATED SPM SENSOR AND ITS TEMPERATURE MEASURING CIRCUIT
摘要
申请公布号
JPH07325092(A)
申请公布日期
1995.12.12
申请号
JP19940119407
申请日期
1994.05.31
申请人
OLYMPUS OPTICAL CO LTD
发明人
MATSUYAMA KATSUHIRO
分类号
G01K7/18;G01B7/00;G01B7/16;G01B21/30;G01N37/00;G01Q20/04;G01Q70/08;G01Q90/00;H01J37/28;(IPC1-7):G01N37/00
主分类号
G01K7/18
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代理人
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