发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To decrease the loop height on a pellet and prevent imperfect connection due to thermal stress, by constituting the inner lead side of a bonding wire as a hall form, and constituting the bonding pad side of the bonding wire as a stitch form. CONSTITUTION:When a semiconductor pellet is bonded to an inner lead 13 by using a bonding wire 10, bonding is performed from the side of a silver-plated surface 13A of the inner lead 13 to the side of a bonding pad 15 on the surface of a semiconductor pellet 11. The bonding is performed on the inner lead 13, so that the bonding wire 10 whose main component is gold is turned into a ball form 10B by the pressure bonding of a capillary. The wire bonding is terminated on the bonding pad 15, so that the bonding wire 10 is turned into a stitch form 10A. Since the inner lead side is constituted as a ball form, imperfect connection which is to be caused by the influence of thermal stress due to material difference can be prevented. Since the bonding pad side is constituted as the stitch form, the height on the pellet can be decreased.
申请公布号 JPH07326638(A) 申请公布日期 1995.12.12
申请号 JP19940120867 申请日期 1994.06.02
申请人 TOSHIBA CORP 发明人 KUROMARU AKIRA
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
主权项
地址
您可能感兴趣的专利