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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07326595(A)
申请公布日期
1995.12.12
申请号
JP19940119113
申请日期
1994.05.31
申请人
NEC KYUSHU LTD
发明人
SARUWATARI MASARU
分类号
H01L21/28;H01L21/265;H01L21/8238;H01L27/092;(IPC1-7):H01L21/28;H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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