发明名称 LEVITATION EQUIPMENT OF THIN BODY
摘要 <p>PURPOSE:To levitate a thin plate in the state of noncontact, by installing a pillar constitution body of a center hole which jets fluid for levitaing and retaining a thin body, in the central part of a thin body holding plane, and vertically suspending and arranging a plurality of retainers on the outer periphery of the constitution body, so as to freely move up and down. CONSTITUTION:A thin body holding plane which horizontally retains a levitated thin body 3 in the noncontact manner is formed in a thin body holder 5. In the bottom surface of a pillar constitution body, air is jetted with pressure from a fluid jetting nozzle 4 as the central hole of the thin body holding plane of the thin body holder 5. A plurality of retainers 7 which are moveable up and down are vertically suspended and arranged on the outer periphery of the pillar constitution body. After the thin body 3 is held by the thin body holder 5, the thin body 3 is raised by 2-3cm from the position of a thin body mounting stand 1, and moved until the the position of a conveyer line 6. The thin body 3 is put on the conveyer line. Thereby a body of fair weight can be levitated.</p>
申请公布号 JPH07326653(A) 申请公布日期 1995.12.12
申请号 JP19940140906 申请日期 1994.05.31
申请人 DOWA MINING CO LTD 发明人 TAKEDA KENJI
分类号 B65G49/07;B25J15/06;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65G49/07
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