发明名称 |
Method for rinsing plate-shaped articles |
摘要 |
A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.
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申请公布号 |
US5474616(A) |
申请公布日期 |
1995.12.12 |
申请号 |
US19930044064 |
申请日期 |
1993.04.06 |
申请人 |
FUJITSU LIMITED |
发明人 |
HAYAMI, YUKA;KOBAYASHI, MASANORI;YAMAZAKI, KEN |
分类号 |
H01L21/304;B08B3/10;B08B11/02;H01L21/00;H01L21/306;(IPC1-7):B08B3/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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