发明名称 |
Apparatus for marking a substrate using ionized gas |
摘要 |
An apparatus suitable for marking a substrate comprises a holder for holding a substrate and a ground for electrically grounding the substrate. At least one needle electrode has a tip located proximate to the substrate so that there is a gap between the substrate and the tip. A high voltage source provides a current to the electrode tip to ionize the gas in the gap so that the ionized gas can impinge upon and mark the substrate.
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申请公布号 |
US5474640(A) |
申请公布日期 |
1995.12.12 |
申请号 |
US19930094653 |
申请日期 |
1993.07.19 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
YE, YAN;GUPTA, ANAND;URITSKY, YURI |
分类号 |
H01L21/68;H01J37/304;H01L21/00;H01L21/02;H01L23/544;(IPC1-7):C23F1/02 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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