发明名称 EQUIPMENT AND METHOD FOR FLIP CHIP JOINING
摘要 PURPOSE: To mass produce a semiconducotr device constituted with many substrates including a flip chip type mutual connector by disposing a magnet slidably outside a frame for applying force of a previously selected magnitude to a holding plate after a second substrate is matched with a first substrate. CONSTITUTION: For setting required matching between a mutual connector on a first substrate 20 and a mutual connector 26 on a second substrate 22, a base 44 is used to mutually adjust a matching assembly 90 and a frame assembly 50. Hereupon, the magnitude of the adjustment is obtained such that force applied between the first and second substrates 20, 22 is determined through magnetic attraction force between a plurality of magnets 60 and a holding plate 96 by disposing a bearing 58 including the magnets 60 slidably outside a container 52. Hereby, there is mass produced a semiconductor device constituted with many substrates including a flip chip mutual connector.
申请公布号 JPH07326641(A) 申请公布日期 1995.12.12
申请号 JP19950028558 申请日期 1995.01.04
申请人 TEXAS INSTR INC <TI> 发明人 JIEEMUZU EFU BERUCHIYAA;GEIRII DABURIYU ANDORIYUUSU
分类号 H01L21/00;H01L21/60;(IPC1-7):H01L21/60 主分类号 H01L21/00
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