UNMAGNIFIED PROJECTION ALIGNER

摘要

PURPOSE:To provide an unmagnified projection aligner securing stable transfer precision by correcting a position change of a carriage in a scanning exposure and relative position deviation between a mask and a substrate caused by leveling drive. CONSTITUTION:This embodiment comprises an optical system for illuminating a pattern on a mask 2; an optical system 1 for projecting a light flux passing therethrough on a sensitive substrate 5 as an unmagnified erect image; and holding means 10 for integrally holding the both. This embodiment further comprises carriage means 6 for integrally holding a mask stage 3 and a sensitive substrate stage 4 to move in a specific direction to the system 1, detecting means 11 to 17 for moving the carriage means 6 to detect a position change for the system 1 and detecting relative position slippages between a mask and a substrate 5, and correcting means 7 to 9 for moving the mask and substrate 5 according to this result to correct the position deviation.