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发明名称
SAMPLE TREATMENT
摘要
申请公布号
JPH07326607(A)
申请公布日期
1995.12.12
申请号
JP19950012309
申请日期
1995.01.30
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
FUJIMOTO KOTARO;TANAKA YOSHIE;KAWAHARA HIRONORI;SATO HITOAKI
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/306;H01L21/321
主分类号
C23F4/00
代理机构
代理人
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