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发明名称
FORMING METHOD OF METAL WIRING
摘要
申请公布号
JPH07326666(A)
申请公布日期
1995.12.12
申请号
JP19940116402
申请日期
1994.05.30
申请人
NEC CORP
发明人
SHIRAISHI YASUSHI
分类号
C23C14/22;H01L21/203;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/768;H01L21/320
主分类号
C23C14/22
代理机构
代理人
主权项
地址
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