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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS MEASURING METHOD
摘要
申请公布号
JPH07326645(A)
申请公布日期
1995.12.12
申请号
JP19940118605
申请日期
1994.05.31
申请人
CITIZEN WATCH CO LTD
发明人
OZAWA TATSUYA
分类号
G01R31/28;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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