发明名称 PROCESS FOR PREPARING A BISMUTH-TYPE SUPERCONDUCTING THIN FILM
摘要 In a process for depositing superconducting thin film of bismuthcontaining compound oxide on a substrate by physical vapour deposition, improvement in that the substrate is heated at a temperature between 670 and 750.degree.C during the deposition.
申请公布号 CA1337719(C) 申请公布日期 1995.12.12
申请号 CA19890609633 申请日期 1989.08.28
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 HIGAKI, KENJIRO;HARADA, KEIZO;FUJIMORI, NAOJI;ITOZAKI, HIDEO;YAZU, SHUJI
分类号 C01G1/00;C01G29/00;C04B41/87;C23C14/08;C23C14/34;H01B13/00;H01L39/24;(IPC1-7):C23C14/34 主分类号 C01G1/00
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