| 摘要 |
<p>PURPOSE:To prolong the life of a bearing greatly in a substrate manipulator of a device for forming a semiconductor thin film in an ultra-high vacuum. CONSTITUTION:A permanent magnet 8 is arranged in an axial direction of a ring-shaped driving side yoke 9, a magnetic coupling is constituted of it and a ring-shaped slave side yoke 10 arranged in vacuum with a vacuum partition 7 between and magnetic attraction force is made to work in an opposite direction of a direction (gravity direction) of a load of the slave side yoke 10.</p> |
