| 摘要 |
PURPOSE:To measure the energy spectrum of X-ray at high speed with high resolution by detecting X-ray quantums having different energy along one direction on an X-ray detection plane. CONSTITUTION:A sample 71 is irradiated with an electron beam 70 and the atoms in the sample 71 are excited to emit 71 an X-ray 10 having intrinsic and continuous energies for each element. A polarization crystal 30 diffracts only a specific energy component of the X-ray 10 and a diffracted X-ray 20 impinges on the phosphor membrane 40 in a secondary X-ray detector. The membrane 40 converts the energy of the X-ray 20 into fluorescence which is it then introduced through a fiber optical element 50 to an avalanche multiplier image pickup camera 62 where faint fluorescence is detected 62 with high sensitivity. The X-ray 20 is a conically spreading X-ray beam impinging on the membrane 40 and the position of a photoconductive film formed on the plane of the image pickup tube 60 corresponds, one and one, to the membrane 40 through an element 50 and the face plate 61 of image pickup tube. consequently, the image of X-ray 20 is detected at a specific position in the output image from the camera corresponding to the position of the membrane 40 on the membrane surface.
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