ACCELERATION SENSOR AND ITS MANUFACTURE

摘要

PURPOSE:To obtain a compact acceleration sensor which has a superior shock resistance and has a high sensitivity over a wide frequency by supporting a piezoelectric vibrator with a support via a conductive protrusion consisting of metal or ceramic being formed by performing flame spraying to the piezoelectric vibrator. CONSTITUTION:A piezoelectric vibrator 100 is provided with a bimorph piezoelectric element 1 which is formed by laminating a plate consisting of a piezoelectric material such as a piezoelectric ceramic plate 2 as a piezoelectric element. An electrode 4 is formed on the opposing main surface of each piezoelectric ceramic plate 2. A protrusion 3 consisting of molybdenum is mounted onto the electrode 4 in a line at the center of the opposing surface of the bimorph piezoelectric element 1 by the flame spraying method. The piezoelectric vibrator 100 is supported via a conductive protrusion. The conductive protrusion is superb in mechanical strength, can stably fix the piezoelectric vibrator 100, and has an improved shock resistance. Also, by supporting the piezoelectric vibrator 100 at the center, an edge part can be freely vibrated like a piezoelectric vibrator in cantilever structure, thus detecting the vibration at a high frequency region with a high sensitivity.