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发明名称
PERIODIC PATTERN INSPECTION APPARATUS
摘要
申请公布号
JPH07318511(A)
申请公布日期
1995.12.08
申请号
JP19940133614
申请日期
1994.05.23
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
UEDA KUNIO
分类号
G01N21/88;(IPC1-7):G01N21/88
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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