| 摘要 |
PURPOSE:To provide an acceleration sensor for reducing manufacturing cost with a simple configuration. CONSTITUTION:Cylindrical sensor-mounts 3 and 4 are fixed on the upper and lower surfaces of a printed circuit board 2, respectively, and a sensor chip 6 is provided on the sensor mounts 3 and 4. The base edge part of a cantilever 6a is fixed to the sensor chip 6 and a diffusion strain gauge 6b for sensing the distortion in the cantilever 6a and for outputting an electrical signal according to the pressure as a detection signal is formed at the base edge part of the cantilever 6a. Silicone gel 8 with a proper density is housed in the sensor mounts 3 and 4 so that the printed circuit board 2 can be covered and the silicone gel 8 seals the sensor chip 6. Also, bellows 9 are provided at the lower edge of the sensor mount 4. The bellows 9 easily bend, thus enabling the silicone gel 8 to travel or thermally expand easily. |
