| 摘要 |
<p>PURPOSE:To obtain a stage suitable to a scanning type aligner, by installing a driving means for moving an object in a specified direction, a guide means having freedom in the plane whose normal is identical to the moving direction, and a driving means which moves the object in a plurality of different directions out of the inplane direction having freedom. CONSTITUTION:A stage for moving a working mask substrate 51 in a projection plane consists of a scanning stage having a sufficiently large stroke in the scanning direction, and a fine movement stage having small stroke in the direction rectangular to the scanning direction, the optical axis direction, and the direction to incline the working mask substrate surface to the projection plane. Magnets 741, 742 are fixed to a fine movement stage frame 71. By individually controlling the currents of two coils 743, 744 fixed to a guide part member, the fine movement stage 71 is driven. By applying the stage to a scanning type aligner, a high perfomance aligner can be obtained.</p> |
