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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07321239(A)
申请公布日期
1995.12.08
申请号
JP19940112775
申请日期
1994.05.26
申请人
SONY CORP
发明人
YAMAGUCHI KAZUHISA
分类号
H01L21/8249;H01L27/06;(IPC1-7):H01L21/824
主分类号
H01L21/8249
代理机构
代理人
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