发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To provide a dynamic random access memory cell which can get high speed operation by making the capacitance of a bit line small. CONSTITUTION:A first semiconductor layer 11, a channel semiconductor layer 12, and a second conductive layer 13, which becomes the other of source and drain regions and besides becomes a storage node 26, too, are provided on a first impurity diffusion layer 24, which becomes one of the source and drain regions and besides becomes a bit line, too. A capacitor insulating layer 13 is provided on the second conductive layer 13. A cell plate 22 is provided on the storage node 26, with the capacitor insulating layer 13 between.
申请公布号 JPH07321228(A) 申请公布日期 1995.12.08
申请号 JP19940112997 申请日期 1994.05.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 MAEDA SHIGENOBU;INOUE YASUAKI;KURIYAMA SACHITADA;MAEKAWA SHIGETO;KANEMOTO KYOZO;IWAMATSU TOSHIAKI
分类号 H01L27/10;H01L21/77;H01L21/8242;H01L21/84;H01L27/06;H01L27/108;H01L27/12;H01L29/78;H01L29/786 主分类号 H01L27/10
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