| 摘要 |
<p>PURPOSE:To improve a setting property even when a fine positioning mechanism is set at a place where disturbance such as vibration is generated by increasing the loop gain of a position by extending an operation stabilizing range. CONSTITUTION:This controller consists of a first acceleration amplifier 10 for converting the output of one first acceleration sensor 9 at least to measure the acceleration of a substrate to an electric signal, one second acceleration sensor 13 at least for measuring the acceleration of a fixed board 14 to support the fine move positioning mechanism, a second acceleration amplifier 11 for converting the output of the second acceleration amplifier 10 to an electric signal, and a low-pass filter 12 provided with a gain control function to filter a relative acceleration signal after comparing the output of the first acceleration amplifier 10 with the output of the second acceleration amplifier 11 and relatively accelerating the substrate and the fixed board. The controller is provided with a second feedback device to feed back the output of the low-pass filter 12 to the preceding step of a current output type power amplifier.</p> |
