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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要
申请公布号
JPH07321324(A)
申请公布日期
1995.12.08
申请号
JP19940105307
申请日期
1994.05.19
申请人
HITACHI LTD
发明人
HORIUCHI KATSUTADA
分类号
H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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