| 摘要 |
<p>PURPOSE:To improve response of temperature control of a processing object of a processing device wherein a chuck is used. CONSTITUTION:Since a heat source means and a heat exchanger are provided inside a heat transmission gas supply course 18 for supplying transmission gas to a fine space formed between a chuck means 12 and a processing object W, heat transmission efficiency of a heat transmission course leading to a processing object from a mounting stand can be improved and in-plane temperature distribution of a processing object can be made uniform.</p> |
