发明名称 Coating a substrate
摘要 A substrate (22) is coated by means of a sputter cathode incorporating a rotating target carrier (2) in front of magnets (13,14). The target carrier protrudes partly into a sputtering chamber (3) for coating the substrate, and partly into a target carrier coating chamber (4) to be coated with target material. Coating of the target carrier with target material in the chamber (4) takes place by means of a source material introduced continuously from outside into this chamber. Only the coating produced is used as the target in the sputtering chamber.
申请公布号 DE4418906(A1) 申请公布日期 1995.12.07
申请号 DE19944418906 申请日期 1994.05.31
申请人 LEYBOLD AG, 63450 HANAU, DE 发明人 SZCZYRBOWSKI, JOACHIM, DR., 63773 GOLDBACH, DE
分类号 C23C14/35;C23C14/56;H01J37/34;(IPC1-7):C23C14/35;C23C16/50;C23C16/54;H05H1/46 主分类号 C23C14/35
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