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发明名称
VERFAHREN ZUR BELEUCHTUNG MIT ZUSAMMENGESETZTEN FARBEN SOWIE BELEUCHTUNG IN VORGEGEBENER WELLENLÄNGE IN EINEM DOPPELFOKUSDETEKTOR UNTER VERWENDUNG CHROMATISCHER ABERRATION.
摘要
申请公布号
DE68923802(T2)
申请公布日期
1995.12.07
申请号
DE19896023802T
申请日期
1989.12.28
申请人
SUMITOMO HEAVY INDUSTRIES, LTD., TOKIO/TOKYO, JP
发明人
MIYATAKE, TSUTOMU, EHIME-KEN 792, JP
分类号
G01B11/00;G03F9/00;H01L21/027;(IPC1-7):G01B11/00
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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