| 摘要 |
<p>An accelerometer is fabricated by forming a proofmass and at least one associated hinge in a silicon substrate. The method includes a bond and etchback process in which an anchor (646) is formed, for bridging the silicon substrate (606) to an oxide support substrate (626), using a selective epitaxy or non-selective epitaxy process to grow the polysilicon anchors.</p> |
