Chemical polishing of ferroelectric materials.

摘要

A method of polishing ferroelectric materials and specifically perovskite materials and still more specifically barium strontium titanate wherein the surface to be polished is initially partially smoothened or planarized by mechanical abrading with final smoothening or planarization provided by a chemical polishing with a polishing wheel using an acidic solution containing essentially the acid, hydrogen peroxide and water. Preferred acids are perchloric acid, acetic acid, nitric acid and combinations thereof.