MACHINE DE POLISSAGE A FEUILLE MICROBRASIVE TENDUE.

摘要

According to the invention the polishing head (disc) of the machine comprises a flat reference head (30) and a micro-abrasive sheet (33) stretched over this head by suitable means (35, 35'). These means may be a dispensing reel and a receiving reel. Application to the polishing of silicon wafers containing built-in components, particularly magnetic read and write heads.