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发明名称
APPARATUS AND METHOD FOR POLISHING.
摘要
申请公布号
EP0683709(A1)
申请公布日期
1995.11.29
申请号
EP19940907449
申请日期
1994.02.08
申请人
RODEL, INC.
发明人
JENSEN, ELMER, WILLIAM
分类号
B24B37/00;B24B37/04;H01L21/304;(IPC1-7):B24B7/22
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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