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经营范围
发明名称
METHOD OF COOLING CHARGED PARTICLE BEAM.
摘要
申请公布号
EP0426861(B1)
申请公布日期
1995.11.29
申请号
EP19900903429
申请日期
1990.02.23
申请人
IKEGAMI, HIDETSUGU
发明人
IKEGAMI, HIDETSUGU
分类号
H05H7/00;G21K1/00;H01J37/04;H05H13/04;(IPC1-7):H05H7/00
主分类号
H05H7/00
代理机构
代理人
主权项
地址
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